Individual Laboratory Facilities:
Ultrahigh-vacuum scanning tunneling microscope system (Omicron)
Ultrahigh-vacuum scanning tunneling microscope system (custom)
Ambient scanning probe microscope system (DI Nanoscope III)
Full-wafer scanning probe microscope system with SCM (DI Dimension 3100)
JEOL 6400 SEM/NPGS electron-beam lithography system
Variable-temperature Hall measurement system (10K - 350K)
Variable-temperature probe station (80K - 700K)
HP 4156 semiconductor parameter analyzer
HP LCR systems for C-V, admittance spectroscopy
Deep-level transient spectroscopy system
TEM sample preparation, sample polishing equipment
STM tip etching apparatus
Optical microscopes
Biological sample preparation lab (precision balance, pH meter, etc.)
PC's, Macs, Sun and HP workstations
SILVACO device and process simulation software tools
Department/University Facilities:
Central Microfabrication Facility
Cambridge/Leica EBMF-10.5 electron-beam lithography system
Electron microscopy facility (TEM/SEM)
San Diego Supercomputer Center
Last updated: 2/17/02
Ed Yu
ety@ece.ucsd.edu