P. A. Rosenthal and E. T. Yu
Department of Electrical and Computer Engineering and Graduate Program
in Materials Science
University of California San Diego
La Jolla, CA. 92093-0407
R. L. Pierson and P. J. Zampardi
Rockwell International Science Center
Thousand Oaks, CA. 91358
We have used cross-sectional scanning Kelvin probe force microscopy
in air to characterize GaAs/AlxGa1-xAs/InyGa1-yAs epitaxial layer structures
grown for use in heterojunction bipolar transistors. Samples were cleaved
in air and microscopy performed on the exposed cross-sections of the epitaxial
layers. Surface potential images obtained from these samples reveal contrast
that is semi-quantitatively consistent with the expected work function
differences between the layers given the known Fermi-level pinning energies
on the (110) GaAs surface. These images allow the emitter, base, collector,
subcollector and substrate regions to be clearly identified. For measurement
conditions under which a large electric field is expected to be present
between the tip and sample, variations in contrast are enhanced, allowing
device regions and dimensions to be more clearly delineated and suggesting
the presence of tip-induced band bending in the sample.